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Fundamental principles of engineering nanometrology /

Leach, R. K.,

Fundamental principles of engineering nanometrology / Richard Leach. - Second edition. - xxi, 361 pages : illustrations ; 25 cm. - Micro & nano technologies series . - Micro & nano technologies. .

Includes bibliographical references and index.

ISBN: 9781455777532 1455777536

LCCN: 2015431422

Subjects--Topical Terms:
Nanotechnology.
Microtechnology.
Metrology.
Metrology.
Microtechnology.
Nanotechnology.

LC Class. No.: T174.7 / .L42 2014

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Fundamental principles of engineering nanometrology /