TY - BOOK AU - Editor: Luque, Antonio TI - Smart Sensors and MEMS: Intelligent Sensing Devices and Microsystems for Industrial Applications SN - 9780081020555 AV - TA 165.S63 2018 PY - 2018/// CY - Duxford PB - Elsevier KW - Detector KW - Industrial Application N1 - Includes Bibliographical References and Index ER -