Introduction to Vacuum Technology (Record no. 39669)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 02663nam a2200409 i 4500 |
| 001 - CONTROL NUMBER | |
| control field | OTLid0001533 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | MnU |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20241120064034.0 |
| 006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS--GENERAL INFORMATION | |
| fixed length control field | m o d s |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION | |
| fixed length control field | cr |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 231025s2023 mnu o 0 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9781942341963 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | MnU |
| Language of cataloging | eng |
| Transcribing agency | MnU |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TA145 |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TK1 |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Hata, David M. |
| Relator term | author |
| 245 00 - TITLE STATEMENT | |
| Title | Introduction to Vacuum Technology |
| Statement of responsibility, etc | David Hata |
| 264 #2 - | |
| -- | Minneapolis, MN |
| -- | Open Textbook Library |
| 264 #1 - | |
| -- | Geneseo, NY |
| -- | Milne Open Textbooks |
| -- | 2023. |
| 264 #4 - | |
| -- | ©2023. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 1 online resource |
| 336 ## - | |
| -- | text |
| -- | txt |
| -- | rdacontent |
| 337 ## - | |
| -- | computer |
| -- | c |
| -- | rdamedia |
| 338 ## - | |
| -- | online resource |
| -- | cr |
| -- | rdacarrier |
| 490 0# - SERIES STATEMENT | |
| Series statement | Open textbook library. |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Formatted contents note | About This Book -- About The Authors -- Industry Testimonials -- Acknowledgements -- Chapter 1: Vacuum: An Enabling Technology -- Chapter 2: The Behavior of Gases -- Chapter 3: An Introduction to Vacuum Systems -- Chapter 4: Rough Vacuum Regime -- Glossary -- Index |
| 520 0# - SUMMARY, ETC. | |
| Summary, etc | Vacuum systems are critical to many industries. They are vital to establishing required process pressures, establishing a clean process environment, and removing reaction by-products from the process chamber. This text, a revision and expansion of David Hata’s Introduction to Vacuum Technology published in 2008, addresses basic topics in vacuum technology for individuals tasked with maintaining vacuum systems and instructors teaching technician-level courses. The topics are carefully curated to the needs of technicians in a production environment and the types of vacuum systems used, and the accompanying laboratory manual and instructor’s guide support the delivery of lecture-laboratory courses. This book approaches vacuum systems from a pressure regime viewpoint, covering basic vacuum science, followed by the rough vacuum regime, including gas load, pumping mechanisms, pressure measurement, vacuum system construction, and basic troubleshooting concepts. The study of high vacuum systems follows and the same topics are revisited, and finally the topics of leak detection and residual gas analysis are discussed. |
| 542 1# - | |
| -- | Attribution-NonCommercial-ShareAlike |
| 546 ## - LANGUAGE NOTE | |
| Language note | In English. |
| 588 0# - | |
| -- | Description based on online resource |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Engineering and Technology |
| Form subdivision | Textbooks |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Electrical Engineering |
| Form subdivision | Textbooks |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Brewer, Elena V. |
| Relator term | author |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Louwagie, Nancy J. |
| Relator term | author |
| 710 2# - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | Open Textbook Library |
| Relator term | distributor |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | <a href="https://open.umn.edu/opentextbooks/textbooks/1533">https://open.umn.edu/opentextbooks/textbooks/1533</a> |
| Public note | Access online version |
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